楼主:
yunghung (ｂ（￣︿￣）ｄ)
2016-06-20 16:05:53麻烦同学帮忙下载一篇期刊,资讯如下
Study of grass formation in GaAs backside via etching using inductively
coupled plasma system.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer
Structures 18(6) . November 2000
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