这里好像在强调10nm node要靠EUV.
但是EUV到目前为止还是不够力,
针对IBM&ASML革命性的EUV产能突破,
其实是差现实状况很多,有人评论:
http://www.eetimes.com/document.asp?doc_id=1323353
EUV Results Bogus, Says Analyst
Intel的下一代的10nm已经摆明不需要用到EUV,
然后最近又继续补刀连7nm都要考虑能不用EUV.
http://ppt.cc/WLPv
Intel forges ahead to 7nm – without the use of EUV lasers
然后一般业界的评估是,
要用上EUV大概是7nm制程以后了.
http://tigrand.blogspot.com/2014/12/7euv.html
台积电将在7奈米制程节点使用EUV？
看来使不使用EUV来做10nm/7nm
会成为Intel跟TSMC技术上的分岔点,
最后谁会是对的一方呢?
※ 引述《Lazulite (Trade Off)》之铭言：
: 先不谈三星挖角成功or叛将了，我们请google大神来看看台积未来n10发展趋势。
: 首先来看看n10要用什么技术
: http://www.asml.com/doclib/investor/asml_3_Investor_Day-Many_ways_to_shrink_MvdBrink1.pdf
: Slide25~30
: 1.10nm logic design can be done in 1D
: ..but at the penalty of 15% larger die at comparable design rules
: 2.EUV: reduced complexity & design rule simplification
: Allowing 2D structures and potentially better yield
: 3.EUV lowest cost and complexity for 2D structures
: 4.Continued significant cost reduction viewed as possible
: 5.EUV supports “free functionality” for the 7nm node
: 再来看看台积对EUV技术的投资
: http://optics.org/news/5/11/35
: TSMC orders production EUV systems
: ASML said that two NXE:3350B EUV systems were scheduled for delivery to TSMC
: in 2015, while two other NXE:3300B systems that the chip maker already owns
: will be upgraded to the full production-scale performance.
: →已有两台再追加两台EUV量产机
: http://electronics360.globalspec.com/article/4760/tsmc-orders-euv-lithography-tools-for-production
: The new NXE:3350B machines are reported to cost €70 million (about US$90
: million) although whether TSMC will pay that price or obtain discounts as
: first user is likely to remain confidential
: Van Hout said that 40W source has been demonstrated for continuous operation
: for more than two months and that 80W operation was good for 24 hours and
: that 100W has been demonsrated for a 60-minute run. An optical source power
: of 80W is equivalent to about 55 wafers per hour or 500 wafers per day.
: →一台EUV要价USD$90million →四台=360million USD
: →80W EUV可提供55wafers/hour或是500 wafers/day
: http://www.asml.com/doclib/investor/asml_6_Investor_Day-EUV_FvHout1.pdf
: Slide13，Continuous stable source operation at 80W for 24 hrs.
: →TSMC EUV机台已可提供稳定80W EUV power
: →目前有2台x500 wafers/day 的n10产能
: http://www.asml.com/doclib/investor/asml_6_Investor_Day-EUV_FvHout1.pdf
: slide 17
: Availability =50% →平均而言，两台只有一台在工作，但技术会随时间变成熟。
: 总结：当众多媒体还在唱虽台积电，但老张已经默默的带领台积进入下一世代，
: 即便叛将再强，能影响的也只是一个世代的制程，毕竟新一代的制程又是
: 新的挑战。
: 附记：柯P曾说过“阿米巴（原虫）被电到都会调整方向，连阿米巴的能力都没有。”
: 若是在PTT还不会用google判断媒体的是非对错，其实跟阿米巴也相差不远了。